Laser light, send from a semiconductor laser, palpates the sample surface horizontally and vertically and the reflected light inclusive the RGB information is captured on the CCD camera.
The 21.6 million measurement points from a z–measurement distance of 7mm enable a high resolution image, as well as a wide measurement possibility. To the various measurement possibilities count contactless roughness measurement on requested locations, thickness measurement on transparent surfaces as well as phase determination in the structure.
Phase determinations are realized with height differences in between the structure.
High resolution images with large depth of field can be realized with a laser microscope.
Contactless roughness measurement on requested locations, just as well as thickness measurements on transparent surfaces, can easily be done with a laser beam.